As cutting-edge AI silicon pushes the physical limits of current semiconductor tooling, Samsung Electronics is reinforcing its foundational manufacturing capabilities by joining an industry initiative with ASML to develop 12-inch photomask technology. The shift to larger reticles provides the critical surface area needed for High NA EUV scanners to expose expansive, high-density dies in single exposures, lowering defects and reducing production expenses across both leading-edge memory and foundry lines. By combining Samsung’s dual-track expertise in memory and foundry with ASML’s advanced optical systems, the expanded alliance establishes an essential technological stepping stone for the next decade of microchip fabrication.
Samsung also plans to introduce ASML’s High NA extreme ultraviolet (EUV) lithography into future DRAM high-volume manufacturing for the first time in the industry by 2028, further demonstrating the readiness of High NA technology to support advanced memory and logic applications. High NA EUV is expected to extend the DRAM scaling roadmap, with improved resolution enabling process simplification and increased efficiency.
The announcement reflects a shared commitment to innovation, technology leadership and long-term partnership. Samsung and ASML expect to continue exploring opportunities for collaboration in areas including advanced memory and innovative manufacturing approaches.
Young Hyun Jun, Vice Chairman & CEO of Samsung Electronics, said: “The AI era is transforming the semiconductor industry and increasing the importance of technological innovation across the entire value chain. Samsung is committed to maintaining leadership in advanced semiconductor manufacturing, including memory and foundry, through breakthrough technologies and strong partnerships. By further strengthening our collaboration with ASML, we are helping lay the foundation for the next generation of AI and semiconductor innovation.”
Christophe Fouquet, President and Chief Executive Officer of ASML, said: “Samsung has been one of ASML’s most important innovation partners for many years. Together, we have helped advance the technologies that underpin modern semiconductor manufacturing. As the industry enters a new era driven by artificial intelligence, close collaboration with our customers becomes even more important. We look forward to working with Samsung to enable the next wave of semiconductor innovation.”